A Novel Voice Coil Motor Used in Nano-positioning Device 后印本

作者： Dong, L [Dong, Liang][ 1,2 ] ¹ Chen, JH [Chen, Jinhua][ 2 ] ¹ Zhang, C [Zhang, Chi][ 2 ] ¹ Wu, DB [Wu, Dingbing][ 1,2 ] ¹ Yu, GW [Yu, Guangwei][ 1 ] ¹
作者单位：

1. VCM; Halbach Array; equivalent magnetic circuit; FEM
提交时间：2017-05-09 12:34:37

摘要: This paper proposes a novel moving-coil voice coil motor(VCM) used for driving nano-positioning device. This VCM implements bilateral Halbach array permanent magnet as the stator and three separated coils with the slotted coil skeleton as the mover.. The VCM can achieve large stroke and nano-level positioning accuracy with the support of the compliant mechanism. Equivalent magnetic circuit method and the finite element analysis (FEA) are used in this paper to analyze the performance of the VCM. The analysis results show that the VCM can achieve a force-current ratio of 90 N/A and force ripple of ±0.19 N, which are superior than the previous designs in the literatures .

VCM Halbach Array equivalent magnetic circuit FEM

分类： 材料科学 >> 材料科学（综合）
引用： ChinaXiv:201705.00231 (或此版本 ChinaXiv:201705.00231V1)
DOI:10.12074/201705.00231V1
CSTR:32003.36.ChinaXiv.201705.00231.V1
科创链TXID： c79ac90a-28a1-453b-81df-8c77f4679273
推荐引用方式： Dong, L [Dong, Liang][ 1,2 ],Chen, JH [Chen, Jinhua][ 2 ],Zhang, C [Zhang, Chi][ 2 ],Wu, DB [Wu, Dingbing][ 1,2 ],Yu, GW [Yu, Guangwei][ 1 ].A Novel Voice Coil Motor Used in Nano-positioning Device.null.[ChinaXiv:201705.00231V1] (点此复制)

版本历史

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2017-05-09 12:34:37

ChinaXiv:201705.00231V1

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